Micro-Devices & Micromechanics Laboratory (MDML)
(Directed by Dr. Julie Zhili Hao)
The Micro-Devices & Micromechanics Laboratory focuses on developing MEMS-based and microfluidic-based micro-devices for various applications, such as gyroscopes and distributed-load detection and analytical and experimental study of micromechanics critical for the ultimate performance of micro-devices.
|
|
|
|
Probe Station for Visually Examining a Micro-device and Probing a Micro-device Mechanically and Electrically
|
Vacuum Pump and Vacuum Chamber for Testing a Micro-device in Vacuum |
|
|
|
|
Wedge Bonder for Making Electrical Connection of a Micro-device to PCBs
|
Microfluidic Device on a PCB for Detecting Distributed Static and Dynamic Loads
|
.JPG)
.JPG)
.JPG)
.JPG)
A 3-axis Micropositioner for Moving a Probe by Precisely Controlled Displacement Agilent Network Analyzer for Measuring the Frequency Response of a Micro-resonator
